Semiconductor O-Rings & Seals

Semiconductor O-Ring & Seal Materials:

Perfluorinated (FFKM)
Fluorocarbon (FKM, VITON®)
Specialty Compounds

The semiconductor industry is utilizing increased levels of toxic fluids and gases, which place extreme demands upon seal design and materials. Not only to prevent system contamination from the external environment, but they must not contribute any contaminates to the system in their own right. Specific needs are required by each of the four primary environments employed by the semiconductor industry:

Gases & Vacuum
Thermal
Plasma
Wet Processing

Working conditions:

Temperatures: up to 300°C (572°F)
Pressures: vacuum to 10-9

Semiconductor Perflouorinated (FFKM) Compounds:

General FFKM Information

Brand	Compound Number	Hardness (Shore A)	Low Temp	High Temp	Color	Recommended For
Parker Parofluor™	FF374-60	60 +- 5	5	608	Purple	Low Particle Generation, Low Metal Ion Content
Parker Parofluor™	FF354-65	65 +- 5	5	608	White	Low Closure Force
Parker Parofluor™	FF102-75	75 +- 5	5	525	Black	Acid Resistant, General Purpose
Parker Parofluor™	FF106-75	75 +- 5	5	500	Black	General Purpose
Parker Parofluor™	FF200-75	75 +- 5	5	608	Black	Low Comp Set, AMS7257, FDA
Parker Parofluor™	FF302-75	75 +- 5	5	608	Brown	Etch Resistant, Low Metal Ions
Parker Parofluor™	FF350-75	75 +- 5	5	608	White	Plasma, High Purity, FDA, USP Class VI
Parker Parofluor™	FF352-75	75 +- 5	5	608	White	General Purpose, Etch Resistant
Parker Parofluor™	FF370-75	75 +- 5	5	608	Black	Low Particle Generation, Low Metal Ions
Parker Parofluor™	FF500-75	75 +- 5	5	550	Black	Broad Chemical Resistance, FDA
Parker Parofluor™	FF580-75	75 +- 5	5	525	Black	Steam Resistant, Amine/Base Resistant
Parker Parofluor™	V8545-75	75 +- 5	5	572	Black	FDA, General Purpose
Parker Parofluor™	FF376-80	80 +- 5	5	508	Purple	Low Particle Generation, Low Metal Ions
Parker Parofluor™	FF400-85	85 +- 5	-40	550	Black	Low Temp, RGD Resistant
Parker Parofluor™	FF202-90	90 +- 5	5	608	Black	Low Compression Set, Extrusion Resistant
Parker Parofluor™	FF582-90	90 +- 5	5	525	Black	Steam Resistant, Amine/Base Resistant
Parker Parofluor™	V8581-90	90 +- 5	5	550	White	Plasma Etch Resistant, Low Stiction
Parker Parofluor™	V8588-90	90 +- 5	5	572	Black	Extrusion & RGD Resistant
Freudenberg Simriz®	70 Simriz® 491	70 +- 5	-20	230	Black	Molded part, O-Rings, Diaphragms
Freudenberg Simriz®	75 Simriz® 494	75 +- 5	-15	230	Black	Diaphragms on request, O-Rings
Freudenberg Simriz®	75 Simriz® 495	75 +- 5	-15	230	Black	O-Rings
Freudenberg Simriz®	75 Simriz® 497	75 +- 5	-15	325	Black	O-Rings
Freudenberg Simriz®	75 Simriz® 506	75 +- 5	-15	230	White	Molded parts, O-Rings
Freudenberg Simriz®	80 Simriz® 492	80 +- 5	-10	230	Black	Molded parts
Freudenberg Simriz®	85 Simriz® 496	85 +- 5	-15	250	Black	O-Rings

Semiconductor Fluorocarbon (FKM, VITON®) Compounds:

General FKM Information

Brand	Compound Number	Hardness (Shore A)	Low Temp	High Temp	Color	Recommended For
Engineered Seal Products	ESP-5001-V75	75 +- 5	-15	400	Black	General purpose
Engineered Seal Products	ESP-5002-V75	75 +- 5	-15	400	Black	General Purpose
Engineered Seal Products	ESP-5004-V90	90 +- 5	-15	400	Black	General purpose
Parker	V0986-50	50 +- 5	-15	400	Brown	General Purpose
Parker	V0763-60	60 +- 5	-15	400	Brown	General Purpose
Parker	V0769-60	60 +- 5	-15	400	Black	General Purpose
Parker	V1262-65	65 +- 5	-15	400	Black	Low Swell - Flex Fuel, Blends UL listed
Parker	VA150-65	65 +- 5	-15	400	Black	General Purpose
Parker	VW252-65	65 +- 5	-15	400	Green	Low Swell
Parker	V0680-70	70 +- 5	-15	400	Red	FDA, USDA, NSF 51, USP Class VI
Parker	VB185-70	70 +- 5	-15	400	Black	Acid Resistant, Steam
Parker	V0747-75	75 +- 5	-15	400	Black	AMS-R-83248, TY I, CL I, UL listed
Parker	V0848-75	75 +- 5	-15	400	Black	PTFE Loaded
Parker	V0884-75	75 +- 5	-15	400	Brown	General Purpose, UL listed
Parker	V1163-75	75 +- 5	-35	400	Black	"GFLT Type", UL listed
Parker	V1164-75	75 +- 5	-15	400	Black	Low Compression Set
Parker	V1226-75	75 +- 5	-15	400	Brown	Low Compression Set, AMS 7276, UL listed
Parker	V1260-75	75 +- 5	-15	400	Black	Very Chemically Resistant, "Viton Extreme" Type
Parker	V1263-75	75 +- 5	-15	400	Black	Low Swell, Flex Fuel Blends, UL listed
Parker	V1289-75	75 +- 5	-55	400	Black	AMS 7379, Low Temp.
Parker	V1436-75	75 +- 5	-15	400	Black	General Purpose, UL Listed
Parker	V1475-75	75 +- 5	-15	400	Black	General Purpose, X-rings
Parker	V1476-75	75 +- 5	-15	400	Brown	General Purpose
Parker	VA151-75 (19357)	75 +- 5	-15	400	Black	General Purpose, UL listed
Parker	VA203-75 (16737)	75 +- 5	-15	400	Black	Extrusion Resistant, Diesel Fuel Injectors
Parker	VB153-75 (19717)	75 +- 5	-15	400	Black	Good Compression Set, Fuels
Parker	VG162-75 (19727)	75 +- 5	-15	400	Black	Good Compression Set, "GF" Type
Parker	VG292-75	75 +- 5	-15	400	Black	Engine Coolant Biodiesel Resistant
Parker	VM100-75	75 +- 5	-15	400	Black	AMS 7276, Low Compression Set
Parker	VM125-75	75 +- 5	-40	400	Black	"GLT" Type, AMS-R-83485
Parker	VM128-75	75 +- 5	-40	400	Black	"GLT" Type, AMS-R-83485
Parker	VM835-75	75 +- 5	-40	400	Black	"GLT" Type, AMS-R-83485
Parker	VW153-75 (16129)	75 +- 5	-15	400	Brown	General Purpose
Parker	VW173-75	75 +- 5	-15	400	Green	Automotive Applications
Parker	VW263-75	75 +- 5	-15	400	Brown	Biodiesel Resistant
Parker	16327-75	75 +- 5	-15	400	Green	Automotive Fuel Quick Disconnects, Good Fuel andPermeation Resistance
Parker	V1274-80	80 +- 5	-15	400	Black	USP Class VI, ISO 10993, FDA, Low Swell
Parker	VA163-80 (19318)	80 +- 5	-15	400	Black	Internally Lubed
Parker	VG286-85	85 +- 5	-50	400	Black	ISO 23936 RGD & Extrusion Resistant, Low Compression Set
Parker	VP104-85	85 +- 5	10	400	Black	Base Resistant
Parker	V0709-90	90 +- 5	-15	400	Black	AMS-R-83248, TY 1, CL 2, AMS 7259
Parker	V0894-90	90 +- 5	-15	400	Brown	General Purpose
Parker	V1411-90	90 +- 5	-15	400	Black	General Purpose
Parker	V1412-90	90 +- 5	-15	400	Brown	General Purpose
Parker	VA153-90	90 +- 5	-15	400	Black	General Purpose
Parker	VW155-90	90 +- 5	-15	400	Green	General Purpose
Parker	VG109-90	90 +- 5	-50	400	Black	ISO 23936 RGD & Extrusion Resistant, Low Compression Set
Parker	V1238-95	95 +- 5	-15	400	Black	Extrusion & RGD Resistant
Freudenberg	75 FKM 180497	75 +- 5	-25	200	Black	O-Rings
Freudenberg	70 FKM 37508	75 +- 5	-25	200	Red	O-Rings, Molded parts, Diaphragms